The GFS delivers a true Primary Mass Flow Standard and is a practical solution for measuring low gas mass flow rates in flow control systems. It consists of an electronic mass balance, enclosure, and electronic instruments to make precise real-time measurements of depleted gas mass in flow control systems.
The system covers the range of 0.2 to 200 mg/s in various gases non-corrosive/non-toxic gases. The flow measurement uncertainty as low as ± 0.013% of reading, and the maximum outlet pressure is 650 kPa absolute. Additionally, fully automated operation is possible through the dedicated PC-Based software program GFSTools™.