The 514x molbox RFM gas flow calibrator kits feature molbox RFM and molbloc-L configurations. They are optimised to cover a wide workload combined with molstic-L and other interconnected hardware. 90 psi of pure N2 or air needs to be supplied. The system features an internal regulator to deliver a stable flow to the molbloc. Also included is a metering valve to regulate mass flow required for the device under test.
Flow ranges cover from 1 sccm to 50 slm, and reading total one-year accuracy of ± 0.5 %.